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Conference Introduction

With the advent of 5G era, the demand for high frequency, high temperature, high power, high energy efficiency, harsh environment resistance and miniaturized power semiconductor devices is increasing rapidly. At the same time, with the increase of base station channel number and communication radio frequency, MEMS (Micro-Electro-Mechanical System) is one of the related technologies for this trend.  The 12th China International Nanotechnology Industry Expo will be held in Suzhou, Jiangsu Province from October 27th to 29th, 2021. Among the many symposiums, the one on the key technologies and processes of compound semiconductors and piezoelectric thin film devices will be sponsored by the Bureau of Personnel Chinese Academy of Sciences, Jiangsu Nanotech Industry Innovation & Development Center, and organized by Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS. The symposium will invite well-known nanotechnology professionals from universities, research institutes and enterprises to teach relevant knowledge, especially on the processing, testing and analysis of compound semiconductor power electronic devices and AlN MEMS devices. This symposium is intended to provide an opportunity for communication in the related research and development fields.

Conference Introduction

Organization

Organized by

    • Personnel Bureau of Chinese Academy of Sciences

    • Jiangsu nanotechnology industry innovation center
    • Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS
    • Suzhou Nano Technology Development Co., Ltd.

Main topics

Main topics

Topics discussed at this meeting included but are not limited to:

2021 Agenda arrangement



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Date: Oct. 27

Location:A209-A210

Time

Host

Speaker

Speaker ’s Position / Organization and Speech Title

13:30-13:40

Baoshun Zhang

13:40-14:20

Baoshun Zhang

Jincheng Zhang

President, Xidian University
Research of Novel Wide Bandgap Semiconductor Electronic Eevices

14:20-15:00

Baoshun Zhang

Shibing Long

Professor , University of Science and Technology of China
Ultra wide band gap Ga2O3 semiconductor power electronic devices

15:00-15:30

Tea Break

15:30-16:10

Baoshun Zhang

Junwei Luo

Professor/Institute of Semiconductors, CAS
Physics of ultrafast laser annealing in semiconductors

16:10-16:50

Baoshun Zhang

Jinyan Wang

Professor, Beijing University
Key Issues of Semiconductor Devices for the New Generation High Frequency/High Voltage Switching Mode Power Supply

16:50-17:30

Baoshun Zhang

Changsi Peng

Professor, Soochow University
Laser Patterning-Induced Nanostructure Array epitaxy / Lithography Synchronization Solution



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Date: Oct. 28

Location:A202-203

Time

Host

Speaker

Speaker ’s Position / Organization and Speech Title

9:00-9:50

Zhongming Zeng

Xiaodong Pi

Professor,Zhejiang University
Growth and processing of single-crystal silicon carbide

9:50-10:20

Tea Break

10:20-11:10

Zhongming Zeng

Limin Zhou

Senior Director of Strategic Marketing , MRSI SYSTEMS, MYCRONIC GROUP
Key technologies of chip assembling for compound semiconductor devices in 5G

11:10-12:00

Zhongming Zeng

Chong Hu

Co-CEO,Leaptek Photonics, Inc.
Key Technologies and Application Trends of Edge Emitting Lasers

12:00-13:30

Lunch

13:30-14:15

Dongmin Wu

Guifeng Chen

Professor, Hebei University of Technology
Study on preparation technology of high efficiency and green AlN single crystal thin film

14:15-15:00

Dongmin Wu

Jin Xie

Professor, Zhejiang University
AlN Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Applications

15:00-15:30

Tea Break

15:30-16:15

Dongmin Wu

Bowen Sun

CTO, Wuhan Minsheng New Technology Co., Ltd
The Trend of MEMS Filter in Wireless Communication

16:15-17:00

Dongmin Wu

Jiadong Li

Professor, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS
PMUT for Range-Finding （>5m）Applications

17:00-17:30

Chunhong Zeng

17:30-20:00

Conference Banquet (Invitation Only)



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Date: Oct. 29

Location:Nano-Fabrication Facility

Time

Host

Speaker

Speaker ’s Position / Organization and Speech Title

9:00-11:50

Chunhong Zeng

Baoshun Zhang

Professor, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS
visit Nano-Fabrication Facility and Technical Communication


Speakers

Speakers of 2021 Conference


Speakers of 2021 Conference
陈贵锋 （Hebei University of Technology Professor）
Study on preparation technology of high efficiency and green AlN single crystal thin film
Dean of Materials Physics Department, School of Materials Science and Engineering, Hebei University of Technology, director of Engineering Laboratory of Optoelectronic Functional Crystal Materials of Hebei Province. At present, the main research direction includes: 1) green industrial preparation method of self-supporting substrate for group III-V nitride materials; 2) application of GaN based photoelectrochemical devices in artificial photosynthesis; 3) study on nano quantum dot solar cell; 4) study on preparation and properties of monocrystalline silicon materials for integrated Circuits.
Speakers of 2021 Conference
Chong Hu （Leaptek Photonics, Inc. Co-CEO）
Key Technologies and Application Trends of Edge Emitting Lasers
Dr. Hu, co-founder of Leaptek Photonics, has PhD in Electrical Engineering from the University of Virginia and bachelor degree from Tsinghua University. With over 15 years of experience in the optoelectronics field, Dr. Hu has acted as Product Engineering Director at NeoPhotonics and Investment Director at Cash Capital Investment Management. Dr. Hu has wide experience in the semiconductor industry and the operations. Dr. Hu has co-founded Leaptek Photonics with international top team in 2020, and serve as Co-CEO, dedicated for the development and manufacturing of high-end compound semiconductor photonic devices.
Speakers of 2021 Conference
Shibing Long （University of Science and Technology of China Professor）
Ultra wide band gap Ga2O3 semiconductor power electronic devices
Shibing Long received the B.S. degree in applied physics in 1999 and M.E. degree in materials physics in 2002 from the University of Science and Technology Beijing and the Ph.D. degree in microelectronics and solid state electronics in 2005 from the Institute of Microelectronics, Chinese Academy of Sciences (IMECAS). From 2005 to 2018, he worked in IMECAS as assistant professor, associate professor and professor. During 2011 to 2012, he was a visiting scolar in Universitat Autònoma de Barcelona (UAB), Spain. From 2018, he is a professor in the School of Microelectronics, University of Science and Technology of China. He has been involved in the research of nanofabrication technology, memory (RRAM, DRAM) and ultrawide bandgap semiconductor devices.
Speakers of 2021 Conference
Jun-Wei Luo （Institute of Semiconductors, CAS Researcher ）
Physics of ultrafast laser annealing in semiconductors
Jun-Wei Luo is a professor at the Institute of Semiconductors, CAS and deputy director of the State Key Laboratory of Superlattices and Microstructures. He was awarded his Ph.D degree in condensed matter physics in 2016 from this institute and then appointed the Postdoctoral Fellow, Scientist, and Senior Scientist with the U.S. Department of Energy's (DOE's) National Renewable Energy Laboratory (NREL) from 2017 to 2014. He was awarded the National Science Fund for Distinguished Young Scholars in 2019. His research involves cutting-edge semiconductors band theory and simulation applied to problems across silicon photonics and silicon quantum computing, including silicon-based light emitting materials and spin-orbit coupling effects. He has published more than 80 peer-reviewed papers, including one in Nature Physics, one in Nature Nanotechnology and one in Nature Communications, and 6 in PRL as the first or corresponding author.
Speakers of 2021 Conference
Xiaodong Pi （Zhejiang University Professor）
Growth and processing of single-crystal silicon carbide
Dr. Xiaodong Pi is a full professor in the State Key Laboratory of Silicon Materials, School of Materials Science and Engineering and Hangzhou Innovation Center at Zhejiang University. He is a member of the editorial advisory board of Applied Physics Letters (2017 – 2022) , a member of the advisory panel of Nanotechnology (2019-2021), a member of the NSFC Panel for Semiconductor Science & Technology 2035 and chair of the Materials Session of 2021IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
He obtained his PhD degree in the department of physics at the University of Bath, UK with the Derek Chesterman medal for original research in 2004. He then carried out research in the department of engineering physics at McMaster University, Canada and in the department of mechanical engineering at the University of Minnesota, USA. Dr. Pi joined Zhejiang University as an associated professor near the end of 2008. He was promoted to be a full professor in 2012.
Dr. Pi has published a series of papers in peer-reviewed journals and meetings (e. g., PRL, PRB, APL, Advanced Materials, Materials Science and Engineering R, ACS Nano, Nano Letters, Nano Energy and IEDM). His research mainly concerns silicon and silicon carbide materials and devices.
Speakers of 2021 Conference
孙博文 （Wuhan Minsheng New Technology Co., Ltd CTO）
The Trend of MEMS Filter in Wireless Communication
Dr. Jeffrey Soon majors in both design and process in Microelectromechanical Systems. From 2002 to 2006, he studied for a bachelor's degree in microelectronics engineering at Liverpool John Moores University in the United Kingdom. From 2011 to 2015, he pursued his Ph.D. degree in Electronic and Computer Engineering at the National University of Singapore, he was the Director of the Research Center Laboratory of Delta Electronics Co., Ltd. and Deputy Director of the Delta Electronics-Nanyang Technological University Joint Laboratory. Before that, he served Singapore Microelectronics Scientist and senior engineer of the Institute of Microelectronics, A*STAR Singapore; Jeffrey is committed to the design and manufacture of AlN and Si MEMS devices. Especially with the knowledge of creating RF-MEMS, multi-physics simulation based on finite element model or equivalent model with years of professional skills in microfabrication, back-end packaging and characterization equipment, he has over 15 years of RF MEMS research, products development and management experience. In the field, he has cooperated with top researchers at home and abroad, and has more than 50 academic publications, > 10 patents, and more than 500 academic international citations. He is currently the Chief Technology Officer and Deputy General Manager of MEMSONICS Technology led the team to practice and promote the commercialization of radio frequency RF MEMS products.
Speakers of 2021 Conference
Jinyan Wang （Institue of Microelectronics, PKU Professor）
Key Issues of Semiconductor Devices for the New Generation High Frequency/High Voltage Switching Mode Power Supply
Dr. Jinyan Wang received the B.E. degree and Master of Engineering in microelectronics from the Xidian University in 1993 and 1996, respectively. He received the Ph.D degree in microelectronics and solid-state electronics from Peking University in 2000. After working as a post-doctoral researcher at Institute of Microelectronics, Peking University, he became a lecturer in 2000, where he worked on the characterization and reliability of MOS devices, and then he received the associate Professor title in 2000 and Professor title in 2011 in Peking University. Dr. Wang research interests include semiconductor devices physics, processes and device reliability.
Speakers of 2021 Conference
Jin Xie （Zhejiang University Professor）
AlN Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Applications
Prof Jin Xie received B.Eng. degree from Tsinghua University in 2000, and M.Eng. degree from Zhejiang University in 2003, and Ph.D. degree from Nanyang Technological University, Singapore in 2008. From 2007 to 2011, he worked as a scientist in Institute of Microelectronics, A*STAR, Singapore. From June 2011 to July 2012, he worked as a post-doc researcher in University of California, Berkeley, CA, USA. In October 2012, he joined the School of Mechanical Engineering, Zhejiang University, Hangzhou, China, as a professor. His research interests include microelectromechanical systems (MEMS), micro sensors and actuators, and nanotechnology. He has published more than 90 peer-reviewed journal papers and 70 conference papers in MEMS area, and authorized 6 invention patents. He was TPC member of the conference of IEEE NEMS 2015, 2018, 2020 and Transducers 2021.
Speakers of 2021 Conference
Jincheng Zhang （Xidian University Vice President）
Research of Novel Wide Bandgap Semiconductor Electronic Eevices
He is Assistant president of Xidian University, doctoral supervisor, level II Professor, and was selected as the distinguished professor of Changjiang Scholars of the Ministry of education, the leading talent of the national 10000 person plan, the leading talent of young and middle-aged scientific and technological innovation of the Ministry of science and technology, and the winner of the National Outstanding Youth Fund. He is also a member of the expert group on new display and strategic electronic materials of the Ministry of science and technology. He has been engaged in the research of wide band gap semiconductor materials and devices. He once served as the chairman of the electronic devices session of international academic conferences such as ICNS and DRIP, published more than 400 academic papers, published 3 books, authorized more than 100 invention patents, and his achievements have been specially reported by the internationally famous magazine Semiconductor Today for 8 times, and made more than 50 invited papers at academic conferences at home and abroad, The research achievements have won 2 second prizes of national technological invention and 6 first prizes of provincial and ministerial science and technology.
Speakers of 2021 Conference
Dr. LIMIN ZHOU （MRSI SYSTEMS, MYCRONIC GROUP）
Key technologies of chip assembling for compound semiconductor devices in 5G
Dr. Limin Zhou is a Senior Director of Strategic Marketing at MRSI Systems, Mycronic Group. Prior to joining the company, he was Senior R&D Director at NeoPhotonics, China, NPI & Product Engineering Director in Oclaro Asia, and NPI Operation Director in both JDSU and SAMN-SCI China. He also worked in Sebit as a Professor for HPLD chip development and industrialization. His career began at Chartered Semiconductor（GlobalFoundries）as lithography senior process engineer. Dr. Zhou got his Bachelor degree in HIT，Master and Ph.D degree in XJTU, and he also worked in SJTU as a post doctor.
Speakers of 2021 Conference
Jiadong Li （Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS）
PMUT for Range-Finding （>5m）Applications
Dr. Jiadong Li is a Professor in the Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS, and has been a principal investigator of the Bio-inspird Adaptive Transformmative Systems Laboratory since 2019, was selected as a member into the Youth Innovation Promotion Association，CAS (2014).
He received his B.Sc. degrees in Mechanical Engineering from China University of Petroleum (huadong) in 2004, and received the Ph.D. degree in Mechanical Engineering from the Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 2009. He has been on the Faculty in Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS since 2009, His current research interests include biologically inspired robots and MEMS smart sensor.
Speakers of 2021 Conference
Baoshun Zhang （Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS）
Welcome speech and host
Dr. Zhang, director of nano-fabrication facility of SINANO, professor, PhD advisor, recipient of the State Council government special allowance. He has long been engaged in the research of wide band gap semiconductor material growth and device fabrication, directed or participated in more than 30 national projects, published more than 60 SCI papers, obtained 47 invention patents in China and 1 invention patent in the United States.
Speakers of 2021 Conference
Zhongming Zeng （Suzhou Institute of Nanotech and Nano-bionics, Chinese Academy of Sciences Professor）
Host
Dr. Zeng received the bachelor degree in condensed matter from Centre Southern University in 2000, and Ph. D degree from the Institute of Physics, Chinese Academy of Sciences in 2006. He worked as Postdoctoral researcher in Japan and the United States in 2006-2011.He is now a researcher in Suzhou Institute of Nanotech and Nano bionics, Chinese Academy of Sciences. His current research interest is spintronic materials and devices. The main research direction is spin microwave devices. He is the author or co-author of more than 70 papers published in Nat. Comm., Phys. Rev. Lett., ACS Nano, Adv. Mater., and etc
Speakers of 2021 Conference
Dongmin Wu （Suzhou Institute of Nanotech and Nano-bionics, Chinese Academy of Sciences）
Host
Dr. Wu, researcher, distinguished professor of Shanghai University of Science and Technology. He received Ph. D degree from the Department of Mechanical and Aeronautical Engineering at University of California, Los Angeles. His current research interests include microelectromechanical systems (MEMS), lidar, nano-optics, biological imaging. He is the author of more than 70 papers and has authorized 6 invention patents.
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